I loko o ka honua paʻakikī o ka hana semiconductor, kahi i hana ʻia ai ka manipulation o ka mea ma ke ʻano atomic scale, kū ka implantation ion ma ke ʻano he ʻenehana kihi. ʻO kēia kaʻina hana, ka mea e hoʻopaʻa pololei i nā wafer silika me nā ion dopant e hoʻoponopono i ko lākou mau waiwai uila, hilinaʻi i kahi hoʻomaka koʻikoʻi: ka hana ʻana i kahi kukui ion maʻemaʻe. Aia ma ka pu'uwai o ke kumu ion-ke enekinia o keia nenoai pa'akikī-kahi mea e ho'okō ai i ka ho'oikaika 'ana ma lalo o nā kūlana ko'iko'i: ka filament tungsten.
ʻO kēia uea wili haʻahaʻa, ʻoiaʻiʻo, he mea kupanaha o ka ʻepekema waiwai. He mea ʻino loa ka hoʻokomo ʻana o ka Ion: hoʻohui lākou i ka wela wela, nā kemika ʻino mai nā kinoea e like me BF₃ a i ʻole PH₃, a me ka pōʻino mau. ʻO ka filament, e lawelawe pinepine ana ma ke ʻano he cathode, pono e hoʻomehana ʻia i ka incandescence e hoʻokuʻu i nā electrons pono e hoʻā a hoʻomau i ka plasma. ʻO ka hāʻule ʻana ma ʻaneʻi e alakaʻi i ka paʻa ʻole o ka beam, contamination metala, a me ke kumu kūʻai downtime production.
No ke aha i noho aliʻi ai ka tungsten no kēia hana? Aia ka pane i kona mau waiwai like ʻole:
Kū'ē Kūlana Kiʻekiʻe: Me ka helu hoʻoheheʻe kiʻekiʻe loa o nā metala āpau (3422 degere), mālama ka filament tungsten i ka kūpaʻa i ka wā e hāʻule ai kekahi.
Kū'ē Sputter Kiʻekiʻe: Ke kūʻē nei ia i ka erosion mai ka hoʻokuʻu ʻana i ka plasma, e hōʻoiaʻiʻo ana i ke ola lōʻihi a me nā kukui ion maʻemaʻe.
ʻOi aku ka maikaʻi o ka Electron Emission: He kūpono kona mau waiwai thermionic no ka hana ʻana i ke kahe electron maʻamau e pono ai no ka hoʻokumu ʻana i ka plasma paʻa, ʻoi aku ka nui ma nā kumu Indirectly Heated Cathode (IHC).
ʻO nā koi o ka hanauna hou aʻe - chips, me nā mea no ka silicon carbide (SiC) a me ka gallium nitride (GaN), e hoʻoikaika i ka ʻenehana implantation. Hoʻoikaika kēia i ka pono o nā ʻāpana kumu hilinaʻi ʻoi aku ka -kinekiʻe. Ua ulu ka filament tungsten mai ka uea ma'alahi a hiki i ka -mea ho'ohana pono 'ia, me ka holomua o ka ho'omalu 'ana i ka palaoa a me ka doping (e la'a, me -earth oxides kaka'ikahi) e ho'onui ana i kona pa'a.
No ka loaʻa ʻana o kēia mau ʻāpana koʻikoʻi -miona, pono kahi hoa hana me ka ʻike metallurgical hohonu a me ka kūpaʻa i ka pololei. No ʻelua mau makahiki, ʻo Zhuzhou Kingdon Industrial & Commercial Co., Ltd (W/Mo Mai ka makahiki 2004) he inoa hilinaʻi i nā metala refractory holomua. He mea kūikawā i nā huahana tungsten a me molybdenum, hāʻawi ʻo Kingdon i ka -maʻemaʻe kiʻekiʻe, nā mea i hana mau ʻia e pono ai no ke koi ʻana i nā noi e like me ka hoʻokomo ʻana i nā ion.
No nā mea ʻenekinia a me nā loea kūʻai e ʻimi nei i nā ʻāpana kumu ion hilinaʻi, me ka -filaments tungsten hana kiʻekiʻe, hāʻawi ʻo Zhuzhou Kingdon i ka ʻike a me ka maikaʻi o ka hana ʻana.
Zhuzhou Kingdon Industrial & Commercial Co., Ltd (W/Mo Mai ka makahiki 2004)
Hoʻohui: No.9 Alanui o Zhongda, High{1}}Tech Industrial Park, Zhuzhou, Hunan, Kina
Kelepona: +86-731 28470377 / 22868227
Fax: +86-731 28410491
Pūnaewele:www.kdmet.com
